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Analysis of water sojourn time in dual-arm cluster tools with residency time …
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NAIQIMENGCHU

When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time …

Edisi
Vol. 23
ISBN/ISSN
0894-6507
Deskripsi Fisik
-
Judul Seri
-
No. Panggil
620.11 NAI a