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Modeling, analysis and control of dual-arm cluster tools with residency time …
Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate such integrated semiconductor manufacturing equipment. This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state operation, Petri net (PN) models are developed to describe them, which are …
- Edisi
- Vol. 9
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 620.11 NAI m
Schedulability analysis and optimal scheduling of dual-arm cluster tools with…
With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. Thus, it is difficult to schedule them and schedulability is a vitally important issue. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis…
- Edisi
- Vol. 9
- ISBN/ISSN
- -
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 004.64 NAI s
Analysis of water sojourn time in dual-arm cluster tools with residency time …
When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time …
- Edisi
- Vol. 23
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 620.11 NAI a
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