Differential evolutionary algorithms with novel mutation operator for solving…

Edisi

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ISBN/ISSN

978-1-4673-7523-8

Deskripsi Fisik

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Judul Seri

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No. Panggil

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Schedulability analysis oF time-constrained cluster tools with bounded time v…

Cluster tools for some wafer fabrication processes such as low-pressure chemical vapor deposition have strict wafer delay constraints. A wafer that completes processing in a processing chamber should leave the chamber within a specified time limit. Otherwise, the wafer suffers from severe quality troubles due to residual gases and heat within the chamber. An important engineering problem is to …

Modeling, analysis and control of dual-arm cluster tools with residency time …

Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate such integrated semiconductor manufacturing equipment. This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state operation, Petri net (PN) models are developed to describe them, which are …

Schedulability analysis and optimal scheduling of dual-arm cluster tools with…

With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. Thus, it is difficult to schedule them and schedulability is a vitally important issue. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis…

Analysis of water sojourn time in dual-arm cluster tools with residency time …

When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time …