Buku baru
Buku baru
Buku lama
Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate such integrated semiconductor manufacturing equipment. This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state operation, Petri net (PN) models are developed to describe them, which are …
With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. Thus, it is difficult to schedule them and schedulability is a vitally important issue. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis…
When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time …
The γ-alumina powder is a potential material for washcoat application. This paper shows the preparation of γ-alumina using ultrasonic technique in order to obtain nanocrystalline of γ-alumina powder. The 50 gr of the γ-alumina powders was treated in the 250 gr ethanol solution using ultrasonic technique within 10, 20, 30, and 60 minutes, respectively. The process of sonication was set at th…