Ditapis dengan
Schedulability analysis oF time-constrained cluster tools with bounded time v…
Cluster tools for some wafer fabrication processes such as low-pressure chemical vapor deposition have strict wafer delay constraints. A wafer that completes processing in a processing chamber should leave the chamber within a specified time limit. Otherwise, the wafer suffers from severe quality troubles due to residual gases and heat within the chamber. An important engineering problem is to …
- Edisi
- Vol. 5
- ISBN/ISSN
- -
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 004.64 JAH s
Analysis of water sojourn time in dual-arm cluster tools with residency time …
When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time …
- Edisi
- Vol. 23
- ISBN/ISSN
- 0894-6507
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 620.11 NAI a
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