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Modeling, analysis and control of dual-arm cluster tools with residency time …
Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate such integrated semiconductor manufacturing equipment. This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state operation, Petri net (PN) models are developed to describe them, which are …
- Edisi
- Vol. 9
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 620.11 NAI m
Schedulability analysis and optimal scheduling of dual-arm cluster tools with…
With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity time variation can make an originally feasible schedule infeasible. Thus, it is difficult to schedule them and schedulability is a vitally important issue. With bounded activity time variation considered, this paper addresses their real-time scheduling issues and conducts their schedulability analysis…
- Edisi
- Vol. 9
- ISBN/ISSN
- -
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 004.64 NAI s
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