This paper presents the results of the characterization of 19 industrial customerpsilas measurements of harmonics in their distribution system of medium voltage level, jointly with a software application to carry out a probabilistic evaluation of levels of distortion of currents and harmonic voltages on their systems. The developed program is based on Monte Carlopsilas simulation technique and …
Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate such integrated semiconductor manufacturing equipment. This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state operation, Petri net (PN) models are developed to describe them, which are …
When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in a processing module should be carefully controlled such that it is in a permissive range. Activity time variation often results in wafer sojourn time fluctuation and makes an originally feasible schedule infeasible. Thus, it is very important to know how the wafer sojourn time changes when activity time …