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Modeling, analysis and control of dual-arm cluster tools with residency time …
Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate such integrated semiconductor manufacturing equipment. This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state operation, Petri net (PN) models are developed to describe them, which are …
- Edisi
- Vol. 9
- ISBN/ISSN
- 1545-5955
- Deskripsi Fisik
- -
- Judul Seri
- -
- No. Panggil
- 620.11 NAI m
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