Cluster tools for some wafer fabrication processes such as low-pressure chemical vapor deposition have strict wafer delay constraints. A wafer that completes processing in a processing chamber should leave the chamber within a specified time limit. Otherwise, the wafer suffers from severe quality troubles due to residual gases and heat within the chamber. An important engineering problem is to …
The use of multiple robots sharing a workspace can increase the productivity and the versatility of complex applications, making the existence of cells with several robots more common. On the other hand, when the robots are used to perform independent tasks in a shared workspace each one becomes a mobile obstacle for the other. Several methods have been proposed to deal with the problem of robo…
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