The ratio of CO2 emissions from power plants to natural emissions is a measure of the environmental impact associated with geothermal power production. Emissions from Icelandic geothermal power plants amounted to 1.6 × 108 kg year−1 in 2002. Two independent estimates of natural CO2 emissions range between 1 × 108 and 2 × 109 kg year−1. Thus, power plant emissions are significant compared…
Cluster tools for some wafer fabrication processes such as low-pressure chemical vapor deposition have strict wafer delay constraints. A wafer that completes processing in a processing chamber should leave the chamber within a specified time limit. Otherwise, the wafer suffers from severe quality troubles due to residual gases and heat within the chamber. An important engineering problem is to …