At Mt. Amiata (Italy) geothermal energy is used, since 1969, to generate electricity in five plants with a nominal capacity of 88 MW. Anomalous levels of mercury characterise geothermal fluids of Mt. Amiata, an area renowned for its vast cinnabar deposits and for the mercury production carried out in the past. Mercury emission rates range from 300 to 400 g/h, or 3–4 g/h per MW electrical inst…
Cluster tools for some wafer fabrication processes such as low-pressure chemical vapor deposition have strict wafer delay constraints. A wafer that completes processing in a processing chamber should leave the chamber within a specified time limit. Otherwise, the wafer suffers from severe quality troubles due to residual gases and heat within the chamber. An important engineering problem is to …