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Ditemukan 1 dari pencarian Anda melalui kata kunci: subject="Chemical vapor deposi...
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Schedulability analysis oF time-constrained cluster tools with bounded time v…
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Ja Hee KimTAE, Eog Lee

Cluster tools for some wafer fabrication processes such as low-pressure chemical vapor deposition have strict wafer delay constraints. A wafer that completes processing in a processing chamber should leave the chamber within a specified time limit. Otherwise, the wafer suffers from severe quality troubles due to residual gases and heat within the chamber. An important engineering problem is to …

Edisi
Vol. 5
ISBN/ISSN
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Deskripsi Fisik
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Judul Seri
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No. Panggil
004.64 JAH s