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Ditemukan 1 dari pencarian Anda melalui kata kunci: author="MENGCHU, Zhou"
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Modeling, analysis and control of dual-arm cluster tools with residency time …
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NAIQI, WuMENGCHU, Zhou

Because of residency time constraints and activity time variation of cluster tools, it is very difficult to operate such integrated semiconductor manufacturing equipment. This paper addresses their real-time operational issues. To characterize their schedulability and achieve the minimum cycle time at their steady-state operation, Petri net (PN) models are developed to describe them, which are …

Edisi
Vol. 9
ISBN/ISSN
1545-5955
Deskripsi Fisik
-
Judul Seri
-
No. Panggil
620.11 NAI m